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US07960832B2 Integrated circuit arrangement with layer stack 有权
集成电路布置与层叠

Integrated circuit arrangement with layer stack
Abstract:
An integrated circuit arrangement includes an electrically conductive conduction structure made from copper or a copper alloy. At a side wall of the conduction structure, there is a layer stack which includes at least three layers. Despite very thin layers in the layer stack, it is possible to achieve a high barrier action against copper diffusion combined with a high electrical conductivity, as is required for electrolytic deposition of copper using external current.
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