Invention Grant
US07960981B2 Apparatus for obtaining planarity measurements with respect to a probe card analysis system
有权
用于获得关于探针卡分析系统的平面度测量的装置
- Patent Title: Apparatus for obtaining planarity measurements with respect to a probe card analysis system
- Patent Title (中): 用于获得关于探针卡分析系统的平面度测量的装置
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Application No.: US12547118Application Date: 2009-08-25
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Publication No.: US07960981B2Publication Date: 2011-06-14
- Inventor: John T. Strom , Raymond H. Kraft
- Applicant: John T. Strom , Raymond H. Kraft
- Applicant Address: US NJ Flanders
- Assignee: Rudolph Technologies, Inc.
- Current Assignee: Rudolph Technologies, Inc.
- Current Assignee Address: US NJ Flanders
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: G01R31/308
- IPC: G01R31/308 ; G01R31/00
Abstract:
A system and method of mitigating the effects of component deflections in a probe card analyzer system may implement three-dimensional comparative optical metrology techniques to model deflection characteristics. An exemplary system and method combine non-bussed electrical planarity measurements with fast optical planarity measurements to produce “effectively loaded” planarity measurements.
Public/Granted literature
- US20100073019A1 APPARATUS FOR OBTAINING PLANARITY MEASUREMENTS WITH RESPECT TO A PROBE CARD ANALYSIS SYSTEM Public/Granted day:2010-03-25
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