Invention Grant
- Patent Title: Methods and apparatus for multi-modal wafer testing
- Patent Title (中): 多模式晶圆测试的方法和装置
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Application No.: US12275226Application Date: 2008-11-21
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Publication No.: US07960986B2Publication Date: 2011-06-14
- Inventor: Morgan T. Johnson
- Applicant: Morgan T. Johnson
- Applicant Address: US OR Hillsboro
- Assignee: Advanced Inquiry Systems, Inc.
- Current Assignee: Advanced Inquiry Systems, Inc.
- Current Assignee Address: US OR Hillsboro
- Agency: Perkins Coie LLP
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R31/26

Abstract:
Access to integrated circuits of a wafer for concurrently performing two or more types of testing, is provided by bringing a wafer and an edge-extended wafer translator into an attached state. The edge-extended wafer translator having wafer-side contact terminals and inquiry-side contact terminals disposed thereon, a first set of wafer-side contact terminals being electrically coupled to a first set of inquiry-side contact terminals, and a second set of wafer-side contact terminals being electrically coupled to a second set of inquiry-side contact terminals. The edge-extended wafer translator having a central portion generally coextensive with the attached wafer, and an edge-extended portion extending beyond the boundary generally defined by the outer circumferential edge of the wafer. A first set of pads of at least one integrated circuit is electrically coupled to the first set of wafer-side contact terminals, and a second set of pads of the integrated circuit is electrically coupled to the second set of wafer-side contact terminals. The edge-extended wafer translator may be shaped such that its edge-extended portion is not coplanar with the central portion thereof.
Public/Granted literature
- US20090289645A1 Methods And Apparatus For Multi-Modal Wafer Testing Public/Granted day:2009-11-26
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