Invention Grant
- Patent Title: Closed-grid bus architecture for wafer interconnect structure
- Patent Title (中): 晶圆互连结构的闭路总线架构
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Application No.: US12763907Application Date: 2010-04-20
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Publication No.: US07960990B2Publication Date: 2011-06-14
- Inventor: Charles A. Miller , John Matthew Long
- Applicant: Charles A. Miller , John Matthew Long
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agency: Kirton & McConkie
- Main IPC: G01R31/28
- IPC: G01R31/28

Abstract:
An interconnect structure employs a closed-grid bus to link an integrated circuit tester channel to an array of input/output (I/O) pads on a semiconductor wafer so that the tester channel can concurrently communicate with all of the I/O pads. The interconnect structure includes a circuit board implementing an array of bus nodes, each corresponding to a separate one of the I/O pads. The circuit board includes at least two layers. Traces mounted on a first layer form a set of first daisy-chain buses, each linking all bus nodes of a separate row of the bus node array. Traces mounted on a second circuit board layer form a set of second daisy-chain buses, each linking all bus nodes of a separate column of the bus node array. Vias and other circuit board interconnect ends of the first and second daisy-chain buses so that they form the closed-grid bus. Each bus node is connected though a separate isolation resistor to a separate contact pad mounted on a surface of the circuit board. A set of spring contacts or probes link each contact pad to a separate one of the I/O pads on the wafer.
Public/Granted literature
- US20100264947A1 CLOSED-GRID BUS ARCHITECTURE FOR WAFER INTERCONNECT STRUCTURE Public/Granted day:2010-10-21
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