Invention Grant
- Patent Title: Test apparatus and probe card
- Patent Title (中): 测试仪器和探针卡
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Application No.: US12509770Application Date: 2009-07-27
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Publication No.: US07960991B2Publication Date: 2011-06-14
- Inventor: Yasushi Shouji
- Applicant: Yasushi Shouji
- Applicant Address: JP Tokyo
- Assignee: Advantest Corporation
- Current Assignee: Advantest Corporation
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JP2007-018425 20070129
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R31/26

Abstract:
Provided is a test apparatus including a test head main body 130 that communicates a signal with the device under test 200, a prober 110 on which the device under test 200 is mounted, and a probe card 300 positioned between the test head main body 130 and the prober 110, where the probe card 300 includes: a plurality of probe pins 320 provided on a surface thereof facing the prober 110 and electrically connected to a terminal of the device under test 200; a plurality of test head pads 330 provided on a surface thereof facing the test head main body 130 and electrically connected to spring pins 129 on the test head main body 130 and to the probe pins 320; and prober pads 340 provided on a surface thereof facing the prober 110 and electrically connected to the plurality of probe pins 320.
Public/Granted literature
- US20100026333A1 TEST APPARATUS AND PROBE CARD Public/Granted day:2010-02-04
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