Invention Grant
- Patent Title: Method for determining intensity distribution in the image plane of a projection exposure arrangement
- Patent Title (中): 用于确定投影曝光装置的图像平面中的强度分布的方法
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Application No.: US12065451Application Date: 2006-09-02
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Publication No.: US07961297B2Publication Date: 2011-06-14
- Inventor: Joern Greif-Wuestenbecker , Beate Boehme , Ulrich Stroessner , Michael Totzeck , Vladimir Kamenov , Olaf Dittmann , Daniel Kraehmer , Toralf Gruner , Bernd Geh
- Applicant: Joern Greif-Wuestenbecker , Beate Boehme , Ulrich Stroessner , Michael Totzeck , Vladimir Kamenov , Olaf Dittmann , Daniel Kraehmer , Toralf Gruner , Bernd Geh
- Applicant Address: DE Jena
- Assignee: Carl Zeiss SMS GmbH
- Current Assignee: Carl Zeiss SMS GmbH
- Current Assignee Address: DE Jena
- Agency: Patterson Thuente Christensen Pedersen, P.A.
- Priority: DE102005042496 20050905
- International Application: PCT/EP2006/008581 WO 20060902
- International Announcement: WO2007/028553 WO 20070315
- Main IPC: G03B27/72
- IPC: G03B27/72 ; G03B27/32 ; G03B27/68 ; G03B27/42 ; G03B27/54

Abstract:
A method for determining intensity distribution in the focal plane of a projection exposure arrangement, in which a large aperture imaging system is emulated and a light from a sample is represented on a local resolution detector by an emulation imaging system. A device for carrying out the method and emulated devices are also described. The invention makes it possible to improve a reproduction quality since the system apodisation is taken into consideration. The inventive method includes determining the integrated amplitude distribution in an output pupil, combining the integrated amplitude distribution with a predetermined apodization correction and calculating a corrected apodization image according to the modified amplitude distribution.
Public/Granted literature
- US20080212060A1 Method for Determining Intensity Distribution in the Image Plane of a Projection Exposure Arrangement Public/Granted day:2008-09-04
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