Invention Grant
- Patent Title: Drive control method and unit for micro machine device
- Patent Title (中): 微机设备的驱动控制方法和单元
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Application No.: US12010243Application Date: 2008-01-23
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Publication No.: US07961448B2Publication Date: 2011-06-14
- Inventor: Naoyuki Mishima , Yu Yonezawa , Takeaki Shimanouchi , Xiaoyu Mi , Takeshi Takano , Nobuhisa Aoki , Yuuta Nakaya
- Applicant: Naoyuki Mishima , Yu Yonezawa , Takeaki Shimanouchi , Xiaoyu Mi , Takeshi Takano , Nobuhisa Aoki , Yuuta Nakaya
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Fujitsu Patent Center
- Priority: JP2007-013281 20070124
- Main IPC: H01H9/00
- IPC: H01H9/00
Abstract:
A drive control method for a micro machine device is provided. The micro machine device is made up of first and second electrodes opposed to each other and a dielectric layer disposed between them. The drive control method includes the steps of applying a control voltage between the first and the second electrodes so that an electrostatic force is exerted on the first and the second electrodes for displacing the first or the second electrode, and switching polarity of the control voltage at a predetermined period or a shorter period.
Public/Granted literature
- US20080180872A1 Drive control method and unit for micro machine device Public/Granted day:2008-07-31
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