Invention Grant
- Patent Title: Heating crucible for organic thin film forming apparatus
- Patent Title (中): 用于有机薄膜形成装置的加热坩埚
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Application No.: US10652493Application Date: 2003-09-02
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Publication No.: US07962016B2Publication Date: 2011-06-14
- Inventor: Yun Soo Choe , Ok Keun Song , Hyung Min Kim , Takashi Ujihara , Takeo Wakimoto , Naofumi Hashimoto
- Applicant: Yun Soo Choe , Ok Keun Song , Hyung Min Kim , Takashi Ujihara , Takeo Wakimoto , Naofumi Hashimoto
- Applicant Address: KR Yongin
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2002-0052898 20020903
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C16/00
Abstract:
Provided is a heating crucible for an organic thin film forming apparatus, the heating crucible including a main body in which to contain an organic substance, a cover provided on the main body, the cover formed of an insulating material and having a nozzle through which a gaseous organic substance comes out from the main body, a cover heater formed as a thin film type on the top surface of the cover, and a body heater heating the main body.
Public/Granted literature
- US20040042770A1 Heating crucible for organic thin film forming apparatus Public/Granted day:2004-03-04
Information query
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