Invention Grant
- Patent Title: Integrated absolute and differential pressure transducer
- Patent Title (中): 集成的绝对和差压传感器
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Application No.: US12353201Application Date: 2009-01-13
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Publication No.: US07962294B2Publication Date: 2011-06-14
- Inventor: Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
- Applicant: Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc
- Current Assignee: MKS Instruments, Inc
- Current Assignee Address: US MA Andover
- Agency: Cochran Freund & Young LLC
- Agent James R. Young
- Main IPC: G01F23/14
- IPC: G01F23/14

Abstract:
A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.
Public/Granted literature
- US20090228219A1 INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER Public/Granted day:2009-09-10
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