Invention Grant
US07962459B2 Method of providing context specific recipes in a semiconductor facility by defining product categories 有权
通过定义产品类别在半导体设备中提供上下文特定配方的方法

Method of providing context specific recipes in a semiconductor facility by defining product categories
Abstract:
The RMS database for a semiconductor process line is established on the basis of product groups or categories, wherein all members of a category are linked by a common feature, such as a common basic design or a common basic technology. Common process recipes in a specified category may then be set up only once, thereby reducing the amount of effort for establishing the database. Moreover, new product types may be readily incorporated into the categories, thereby enabling the employment of the already-established category-specific context information.
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