Invention Grant
US07962459B2 Method of providing context specific recipes in a semiconductor facility by defining product categories
有权
通过定义产品类别在半导体设备中提供上下文特定配方的方法
- Patent Title: Method of providing context specific recipes in a semiconductor facility by defining product categories
- Patent Title (中): 通过定义产品类别在半导体设备中提供上下文特定配方的方法
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Application No.: US10745044Application Date: 2003-12-23
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Publication No.: US07962459B2Publication Date: 2011-06-14
- Inventor: Kay Hellig , Ronald Grünz , Heiko Wagner , Uwe Liebold
- Applicant: Kay Hellig , Ronald Grünz , Heiko Wagner , Uwe Liebold
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams, Morgan & Amerson, P.C.
- Priority: DE10319496 20030430
- Main IPC: G06F17/30
- IPC: G06F17/30

Abstract:
The RMS database for a semiconductor process line is established on the basis of product groups or categories, wherein all members of a category are linked by a common feature, such as a common basic design or a common basic technology. Common process recipes in a specified category may then be set up only once, thereby reducing the amount of effort for establishing the database. Moreover, new product types may be readily incorporated into the categories, thereby enabling the employment of the already-established category-specific context information.
Public/Granted literature
- US20040220968A1 Method of providing context specific recipes in a semiconductor facility by defining product categories Public/Granted day:2004-11-04
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