Invention Grant
- Patent Title: Stage yield prediction
- Patent Title (中): 阶段产量预测
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Application No.: US12154458Application Date: 2008-05-22
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Publication No.: US07962864B2Publication Date: 2011-06-14
- Inventor: Youval Nehmadi , Rinat Shimshi , Vicky Svidenko , Alexander T. Schwarm , Sundar Jawaharlal
- Applicant: Youval Nehmadi , Rinat Shimshi , Vicky Svidenko , Alexander T. Schwarm , Sundar Jawaharlal
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G06F19/00

Abstract:
In one embodiment, a method for predicting yield during the design stage includes receiving defectivity data identifying defects associated with previous wafer designs, and dividing the defects into systematic defects and random defects. For each design layout of a new wafer design, yield is predicted separately for the systematic defects and the random defects. A combined yield is then calculated based on the yield predicted for the systematic defects and the yield predicted for the random defects.
Public/Granted literature
- US20080295047A1 Stage yield prediction Public/Granted day:2008-11-27
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