Invention Grant
US07962864B2 Stage yield prediction 有权
阶段产量预测

Stage yield prediction
Abstract:
In one embodiment, a method for predicting yield during the design stage includes receiving defectivity data identifying defects associated with previous wafer designs, and dividing the defects into systematic defects and random defects. For each design layout of a new wafer design, yield is predicted separately for the systematic defects and the random defects. A combined yield is then calculated based on the yield predicted for the systematic defects and the yield predicted for the random defects.
Public/Granted literature
Information query
Patent Agency Ranking
0/0