Invention Grant
US07964447B2 Process of making carbon nanotube array that includes impregnating the carbon nanotube array with metal
有权
制造碳纳米管阵列的方法，其包括用金属浸渍碳纳米管阵列
- Patent Title: Process of making carbon nanotube array that includes impregnating the carbon nanotube array with metal
- Patent Title (中): 制造碳纳米管阵列的方法，其包括用金属浸渍碳纳米管阵列
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Application No.: US12387871Application Date: 2009-05-08
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Publication No.: US07964447B2Publication Date: 2011-06-21
- Inventor: Gregory M. Chrysler , Thomas S. Dory , James G. Maveety , Edward Prack , Unnikrishnan Vadakkanmaruveedu
- Applicant: Gregory M. Chrysler , Thomas S. Dory , James G. Maveety , Edward Prack , Unnikrishnan Vadakkanmaruveedu
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agent John N. Greaves
- Main IPC: H01L21/58
- IPC: H01L21/58
Abstract:
A carbon nanotube (CNT) array is patterned on a substrate. The substrate can be a microelectronic die or a heat sink for a die. The patterned CNT array is patterned by using a patterned catalyst on the substrate to form the CNT array by growing. The patterned CNT array can also be patterned by using a patterned mask on the substrate to form the CNT array by growing. A computing system that uses the CNT array for heat transfer from the die is also used.
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