Invention Grant
- Patent Title: Thin film resistors integrated at two different metal single die
- Patent Title (中): 薄膜电阻集成在两个不同的金属单模上
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Application No.: US12176612Application Date: 2008-07-21
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Publication No.: US07964919B2Publication Date: 2011-06-21
- Inventor: Eric W. Beach , Vladimir F. Drobny , Derek W. Robinson
- Applicant: Eric W. Beach , Vladimir F. Drobny , Derek W. Robinson
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Warren L. Franz; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L27/11
- IPC: H01L27/11

Abstract:
An integrated circuit includes a first thin film resistor on a first dielectric layer. A first layer of interconnect conductors on the first dielectric layer includes a first and second interconnect conductors electrically contacting the first thin film resistor. A second dielectric layer is formed on the first dielectric layer. A second thin film resistor is formed on the second dielectric layer. A third dielectric layer is formed on the second dielectric layer. A second layer of interconnect conductors on the third dielectric layer includes a third interconnect conductor extending through an opening in the second and third dielectric layers to contact the first interconnect conductor, a fourth interconnect conductor extending through an opening in the second and third dielectric layers to contact the second interconnect conductor, and two interconnect conductors extending through openings in the third dielectric layer of the second thin film resistor. A fifth interconnect conductor extends through an opening in the first dielectric layer to contact a circuit element.
Public/Granted literature
- US20080272460A1 THIN FILM RESISTORS INTEGRATED AT TWO DIFFERENT METAL INTERCONNECT LEVELS OF SINGLE DIE Public/Granted day:2008-11-06
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