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US07965377B2 Method for adjusting a projection objective 有权
调整投影物镜的方法

Method for adjusting a projection objective
Abstract:
A projection objective having a number of adjustable optical elements is optimized with respect to a number of aberrations by specifying a set of parameters describing imaging properties of the objective, each parameter in the set having an absolute value at each of a plurality of field points in an image plane of the projection objective. At least one of the optical elements is adjusted such that for each of the parameters in the set, the field maximum of its absolute value is minimized.
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