Invention Grant
- Patent Title: Method for adjusting a projection objective
- Patent Title (中): 调整投影物镜的方法
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Application No.: US12060543Application Date: 2008-04-01
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Publication No.: US07965377B2Publication Date: 2011-06-21
- Inventor: Wolfgang Emer
- Applicant: Wolfgang Emer
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102004035595 20040722
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/42 ; G03B27/68

Abstract:
A projection objective having a number of adjustable optical elements is optimized with respect to a number of aberrations by specifying a set of parameters describing imaging properties of the objective, each parameter in the set having an absolute value at each of a plurality of field points in an image plane of the projection objective. At least one of the optical elements is adjusted such that for each of the parameters in the set, the field maximum of its absolute value is minimized.
Public/Granted literature
- US20080192220A1 METHOD FOR ADJUSTING A PROJECTION OBJECTIVE Public/Granted day:2008-08-14
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