Invention Grant
US07965446B2 Structure for pattern formation, method for pattern formation, and application thereof 有权
图案形成结构,图案形成方法及其应用

Structure for pattern formation, method for pattern formation, and application thereof
Abstract:
A structure for pattern formation adapted for optically forming a pattern, characterized by comprising: a photocatalyst-containing layer provided on a substrate, the photocatalyst-containing layer containing a material of which the wettability is variable through photocatalytic action upon pattern-wise exposure.
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