Invention Grant
- Patent Title: Measurement apparatus
- Patent Title (中): 测量装置
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Application No.: US12271281Application Date: 2008-11-14
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Publication No.: US07966158B2Publication Date: 2011-06-21
- Inventor: Yuzo Seo
- Applicant: Yuzo Seo
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2007-298817 20071119
- Main IPC: G01C19/00
- IPC: G01C19/00

Abstract:
The measurement apparatus includes a distortion correcting unit configured to generate a plurality of correction signals by correcting the plurality of signals using a distortion coefficient which is stored in the apparatus, a square-root of sum of squares arithmetic unit configured to calculate a square-root of sum of squares of the plurality of correction signals, a first normalizing unit configured to generate a plurality of first normalized signals by dividing each of the plurality of correction signals by the square-root of sum of squares, and a phase arithmetic unit configured to calculate the position of the object based on the plurality of first normalized signals.
Public/Granted literature
- US20090132192A1 MEASUREMENT APPARATUS Public/Granted day:2009-05-21
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