Invention Grant
US07968843B2 Method and apparatus for simultaneous SEM and optical examination 有权
同时进行SEM和光学检查的方法和装置

  • Patent Title: Method and apparatus for simultaneous SEM and optical examination
  • Patent Title (中): 同时进行SEM和光学检查的方法和装置
  • Application No.: US12349195
    Application Date: 2009-01-06
  • Publication No.: US07968843B2
    Publication Date: 2011-06-28
  • Inventor: Hidetoshi Nishiyama
  • Applicant: Hidetoshi Nishiyama
  • Applicant Address: JP Tokyo
  • Assignee: JEOL Ltd.
  • Current Assignee: JEOL Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: The Webb Law Firm
  • Priority: JP2008-101990 20080410
  • Main IPC: H01J37/26
  • IPC: H01J37/26
Method and apparatus for simultaneous SEM and optical examination
Abstract:
Method and apparatus capable of observing a liquid sample. An optical image of the sample and an image using a primary beam, such as an electron beam or charged-particle beam, can be obtained at the same time. The apparatus has a film including a first surface on which the liquid sample is held. The primary beam irradiation column and optical image acquisition viewer are located on opposite sides of the film that acts to block light.
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