Invention Grant
- Patent Title: Semiconductor device reducing output capacitance due to parasitic capacitance
- Patent Title (中): 半导体器件由于寄生电容而降低输出电容
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Application No.: US12474700Application Date: 2009-05-29
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Publication No.: US07968943B2Publication Date: 2011-06-28
- Inventor: Takuya Sunada , Kazuhiko Kusuda , Takeshi Yoshida
- Applicant: Takuya Sunada , Kazuhiko Kusuda , Takeshi Yoshida
- Applicant Address: JP Osaka
- Assignee: Panasonic Electric Works Co., Ltd.
- Current Assignee: Panasonic Electric Works Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2008-165591 20080625
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
Plural through-holes are formed in a region of a semiconductor substrate positioned below a drain region (an element region other than a P-type well region). According to this configuration, an opposing area of the drain region and the semiconductor substrate can be reduced. Therefore, a drain-substrate capacitance Cdsub is reduced, and an output capacitance Coss of an SOI LDMOSFET can be reduced as a result.
Public/Granted literature
- US20090321827A1 SEMICONDUCTOR DEVICE REDUCING OUTPUT CAPACITANCE DUE TO PARASITIC CAPACITANCE Public/Granted day:2009-12-31
Information query
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