Invention Grant
US07969686B2 Self-assembly structures used for fabricating patterned magnetic media
有权
用于制造图案化磁性介质的自组装结构
- Patent Title: Self-assembly structures used for fabricating patterned magnetic media
- Patent Title (中): 用于制造图案化磁性介质的自组装结构
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Application No.: US11964680Application Date: 2007-12-26
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Publication No.: US07969686B2Publication Date: 2011-06-28
- Inventor: Thomas R. Albrecht , Xiao Z. Wu , Henry Hung Yang
- Applicant: Thomas R. Albrecht , Xiao Z. Wu , Henry Hung Yang
- Applicant Address: NL Amsterdam
- Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
- Current Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
- Current Assignee Address: NL Amsterdam
- Agency: Duft Bornsen & Fishman, LLP
- Main IPC: G11B5/82
- IPC: G11B5/82

Abstract:
Methods of defining servo patterns and data patterns for forming patterned magnetic media are described. For one method, a lithographic process is performed to define a servo pattern in servo regions on a substrate. The lithographic process also defines a first data pattern in data regions of the substrate. The first data pattern is then transferred to (i.e., etched into) the data regions. Self-assembly structures are then formed on the data pattern in the data regions to define a second data pattern. The servo pattern is then transferred to the servo regions and the second data pattern is transferred to the data regions. Thus, the servo pattern is defined through lithographic processes while the data pattern is defined by a combination of lithographic processes and self-assembly.
Public/Granted literature
- US20090166321A1 SELF-ASSEMBLY STRUCTURES USED FOR FABRICATING PATTERNED MAGNETIC MEDIA Public/Granted day:2009-07-02
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