Invention Grant
- Patent Title: Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements
- Patent Title (中): 质量流量控制器具有与第二对热敏元件相对的第一对热敏元件
-
Application No.: US12250205Application Date: 2008-10-13
-
Publication No.: US07971480B2Publication Date: 2011-07-05
- Inventor: Alexei V. Smirnov , R. Mike McDonald , Justin Mauck
- Applicant: Alexei V. Smirnov , R. Mike McDonald , Justin Mauck
- Applicant Address: JP Tokyo
- Assignee: Hitachi Metals, Ltd.
- Current Assignee: Hitachi Metals, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Neugeboren O'Dowd PC
- Agent Sean R. O'Dowd
- Main IPC: G01F1/68
- IPC: G01F1/68

Abstract:
One embodiment of the present invention involves a thermal sensor and a method of using the same. One thermal sensor is adapted to output a signal which is unaffected by external longitudinal and orthogonal thermal gradients. In one embodiment, the mass flow controller thermal sensor comprises a capillary tube having an upstream tube portion, a tube bend portion, and a downstream tube portion, the downstream portion being substantially parallel to the upstream portion. A distance between the upstream tube portion and the downstream tube portion in one embodiment is no greater than half the upstream portion and downstream portion lengths, a first pair of thermal sensing elements are coupled to the upstream tube portion and a second pair of thermal sensing elements are coupled to the downstream tube portion.
Public/Granted literature
- US20100089459A1 MASS FLOW CONTROLLER AND METHOD OF OPERATING THE SAME Public/Granted day:2010-04-15
Information query