Invention Grant
US07971480B2 Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements 有权
质量流量控制器具有与第二对热敏元件相对的第一对热敏元件

Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements
Abstract:
One embodiment of the present invention involves a thermal sensor and a method of using the same. One thermal sensor is adapted to output a signal which is unaffected by external longitudinal and orthogonal thermal gradients. In one embodiment, the mass flow controller thermal sensor comprises a capillary tube having an upstream tube portion, a tube bend portion, and a downstream tube portion, the downstream portion being substantially parallel to the upstream portion. A distance between the upstream tube portion and the downstream tube portion in one embodiment is no greater than half the upstream portion and downstream portion lengths, a first pair of thermal sensing elements are coupled to the upstream tube portion and a second pair of thermal sensing elements are coupled to the downstream tube portion.
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