Invention Grant
US07971483B2 Systems and methods for acceleration and rotational determination from an out-of-plane MEMS device
有权
用于从平面外MEMS装置进行加速和旋转确定的系统和方法
- Patent Title: Systems and methods for acceleration and rotational determination from an out-of-plane MEMS device
- Patent Title (中): 用于从平面外MEMS装置进行加速和旋转确定的系统和方法
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Application No.: US12057695Application Date: 2008-03-28
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Publication No.: US07971483B2Publication Date: 2011-07-05
- Inventor: Ryan Supino , Burgess Johnson
- Applicant: Ryan Supino , Burgess Johnson
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Fogg & Powers LLC
- Main IPC: G01P9/04
- IPC: G01P9/04 ; G01C19/56

Abstract:
A Micro-Electro-Mechanical Systems (MEMS) inertial sensor systems and methods are operable to determine linear acceleration and rotation. An exemplary embodiment applies a first linear acceleration rebalancing force via a first electrode pair to a first proof mass, applies a second linear acceleration rebalancing force via a second electrode pair to a second proof mass, applies a first Coriolis rebalancing force via a third electrode pair to the first proof mass, applies a second Coriolis rebalancing force via a fourth electrode pair to the second proof mass, determines a linear acceleration corresponding to the applied first and second linear acceleration rebalancing forces, and determines a rotation corresponding to the applied first and second Coriolis rebalancing forces.
Public/Granted literature
- US20090241662A1 SYSTEMS AND METHODS FOR ACCELERATION AND ROTATIONAL DETERMINATION FROM AN OUT-OF-PLANE MEMS DEVICE Public/Granted day:2009-10-01
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