Connection terminals each include: a bonding portion bonded to a pad of a substrate; a contacting portion disposed to face the bonding portion; a spring portion present between the bonding portion and the contacting portion; and an engaging portion engaged with a portion of a slit provided in a plate-like member. These constituent portions of the connection terminal are formed integrally with each other. The plate-like member has recessed portions formed at predetermined positions, and the connection terminals are electrically connected to the pads of the substrate with the bonding portions of the connection terminals being locked to the recessed portions.