Invention Grant
- Patent Title: High-index UV optical materials for immersion lithography
- Patent Title (中): 用于浸渍光刻的高折射率UV光学材料
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Application No.: US11847128Application Date: 2007-08-29
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Publication No.: US07972438B2Publication Date: 2011-07-05
- Inventor: Yi-Ting Fei , Shen Jen , Bruce Chai
- Applicant: Yi-Ting Fei , Shen Jen , Bruce Chai
- Applicant Address: US FL Sanford
- Assignee: Crystal Photonics, Incorporated
- Current Assignee: Crystal Photonics, Incorporated
- Current Assignee Address: US FL Sanford
- Agency: Allen, Dyer, Doppelt, Milbrath & Gilchrist, P.A.
- Main IPC: C30B29/30
- IPC: C30B29/30

Abstract:
This invention is related to material for use as an ultraviolet (UV) optical element and particularly for use as a 193 nm immersion lens element. The material for use as a UV optical element includes a Lithium Magnesium Aluminate (LMAO) body. The specific compound for this application is the disordered lithium magnesium spinel, having the general composition of LixMg2(1−x)Al4+xO8 where x=0 to 1 as the high-index UV transparent material for immersion lithography. The LMAO body may include a disordered spinel, such as, for example, a single crystal that may be cubic in symmetry, optically isotropic, and having cation disorder within the structure to reduce the intrinsic birefringence (IBR). The LMAO body has certain desired material properties and may be readily made in relatively large sizes suitable for use as the UV optical element for photolithography.
Public/Granted literature
- US20080055715A1 HIGH-INDEX UV OPTICAL MATERIALS FOR IMMERSION LITHOGRAPHY Public/Granted day:2008-03-06
Information query
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