Invention Grant
- Patent Title: Metering of particulate material and vaporization thereof
- Patent Title (中): 颗粒物质的计量和蒸发
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Application No.: US12271250Application Date: 2008-11-14
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Publication No.: US07972443B2Publication Date: 2011-07-05
- Inventor: Michael Long , Thomas W. Palone
- Applicant: Michael Long , Thomas W. Palone
- Applicant Address: US VA Herndon
- Assignee: Global OLED Technology LLC
- Current Assignee: Global OLED Technology LLC
- Current Assignee Address: US VA Herndon
- Agency: Morgan, Lewis & Bockius LLP
- Main IPC: C23C16/448
- IPC: C23C16/448 ; C23F1/00 ; H01L21/306 ; C23C16/06 ; C23C16/22

Abstract:
Apparatus for metering and vaporizing a particulate material, includes: a metering device having: a reservoir for receiving particulate material; a housing having an internal volume and having first and second openings; a rotatable shaft disposed in the internal volume, the shaft having a smooth surface and a circumferential groove; a rotating agitator with a plurality of tines disposed in the reservoir and cooperating with the rotating shaft for fluidizing particulate material and transporting it from the reservoir into the groove; cooperating such that particulate material is transported by the groove; a scraper cooperates with the groove to dislodge particulate material retained therein, and deliver metered amounts of particulate material through the second opening; the rotatable shaft and the scraper cooperates to fluidize the particulate material at the second opening; and a flash evaporator that flash vaporizes the received particulate material.
Public/Granted literature
- US20100122658A1 METERING OF PARTICULATE MATERIAL AND VAPORIZATION THEREOF Public/Granted day:2010-05-20
Information query
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