Invention Grant
- Patent Title: Baffle wafers and randomly oriented polycrystalline silicon used therefor
- Patent Title (中): 挡板和随机取向的多晶硅用于此
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Application No.: US11328438Application Date: 2006-01-09
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Publication No.: US07972703B2Publication Date: 2011-07-05
- Inventor: James E. Boyle , Reese Reynolds , Ranaan Y. Zehavi , Robert W. Mytton , Tom L. Cadwell
- Applicant: James E. Boyle , Reese Reynolds , Ranaan Y. Zehavi , Robert W. Mytton , Tom L. Cadwell
- Applicant Address: US NH Bedford
- Assignee: Ferrotec (USA) Corporation
- Current Assignee: Ferrotec (USA) Corporation
- Current Assignee Address: US NH Bedford
- Agency: Mesmer & Deleault, PLLC
- Main IPC: B32B9/04
- IPC: B32B9/04 ; B32B13/04 ; B32B27/32

Abstract:
Baffle wafers of polycrystalline silicon are placed in non-production slots of a support tower for thermal processing monocrystalline silicon wafers. The polycrystalline silicon is preferably randomly oriented Czochralski polysilicon grown using a randomly oriented seed, for example, CVD grown silicon. An all-silicon hot zone of a thermal furnace may include a silicon support tower placed within a silicon liner and supporting the polysilicon baffle wafers with silicon injector tube providing processing gas within the liner. The randomly oriented polysilicon may be used for other parts requiring a rugged member, for example, within a silicon processing chamber and for structural members.
Public/Granted literature
- US20060211218A1 Baffle wafers and randomly oriented polycrystalline silicon used therefor Public/Granted day:2006-09-21
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