Invention Grant
- Patent Title: Methods of manufacturing image sensors
- Patent Title (中): 制造图像传感器的方法
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Application No.: US11898578Application Date: 2007-09-13
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Publication No.: US07972890B2Publication Date: 2011-07-05
- Inventor: Tae-seok Oh , Duk-seo Park , Jong-wook Hong , Jung-Hyeok Oh
- Applicant: Tae-seok Oh , Duk-seo Park , Jong-wook Hong , Jung-Hyeok Oh
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, PLC
- Priority: KR10-2006-0091338 20060920
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Example embodiments may provide methods of manufacturing an image sensor. Example methods of manufacturing an image sensor may include forming a photoelectric converter in a semiconductor substrate, forming an interlayer insulating film covering a surface of the semiconductor substrate, forming metal wires and an inter-metal insulating film filling between the metal wires on the interlayer insulating film, forming openings above the photoelectric converter by removing a part of the inter-metal insulating film and the interlayer insulating film, curing the surface above the photoelectric converter by irradiating light into the openings, and/or forming a light transmitter filling the openings.
Public/Granted literature
- US20080070342A1 Methods of manufacturing image sensors Public/Granted day:2008-03-20
Information query
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