Invention Grant
- Patent Title: Guard ring extension to prevent reliability failures
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Application No.: US12425708Application Date: 2009-04-17
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Publication No.: US07972909B2Publication Date: 2011-07-05
- Inventor: Nicole Meier Chang , George J. Korsh , Shafqat Ahmed , John Nugent , Ed Nabighian
- Applicant: Nicole Meier Chang , George J. Korsh , Shafqat Ahmed , John Nugent , Ed Nabighian
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agent Rahul D. Engineer
- Main IPC: H01L21/4763
- IPC: H01L21/4763

Abstract:
An embodiment of the present invention is a technique to prevent reliability failures in semiconductor devices. A trench is patterned in a polyimide layer over a guard ring having a top metal layer. A passivation layer is etched at bottom of the trench. A capping layer is deposited on the trench over the etched passivation layer. The capping layer and the top metal layer form a mechanical strong interface to prevent a crack propagation.
Public/Granted literature
- US20090200548A1 GUARD RING EXTENSION TO PREVENT REALIABILITY FAILURES Public/Granted day:2009-08-13
Information query
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