Invention Grant
US07973302B2 Forming phase change memory cells 有权
形成相变存储单元

Forming phase change memory cells
Abstract:
Small phase change memory cells may be formed by forming a segmented heater over a substrate. A stop layer may be formed over the heater layer and segmented with the heater layer. Then, sidewall spacers may be formed over the segmented heater to define an aperture between the sidewall spacers that may act as a mask for etching the stop layer over the segmented heater. As a result of the etching using the sidewall spacers as a mask, sublithographic pore may be formed over the heater. Phase change material may be formed within the pore.
Public/Granted literature
Information query
Patent Agency Ranking
0/0