Invention Grant
- Patent Title: Forming phase change memory cells
- Patent Title (中): 形成相变存储单元
-
Application No.: US12346666Application Date: 2008-12-30
-
Publication No.: US07973302B2Publication Date: 2011-07-05
- Inventor: Yudong Kim , Fabio Pellizzer
- Applicant: Yudong Kim , Fabio Pellizzer
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Agent Lisa K. Jorgenson; Robert Iannucci
- Main IPC: H01L29/02
- IPC: H01L29/02 ; H01L47/00 ; H01L29/04

Abstract:
Small phase change memory cells may be formed by forming a segmented heater over a substrate. A stop layer may be formed over the heater layer and segmented with the heater layer. Then, sidewall spacers may be formed over the segmented heater to define an aperture between the sidewall spacers that may act as a mask for etching the stop layer over the segmented heater. As a result of the etching using the sidewall spacers as a mask, sublithographic pore may be formed over the heater. Phase change material may be formed within the pore.
Public/Granted literature
- US20100163827A1 FORMING PHASE CHANGE MEMORY CELLS Public/Granted day:2010-07-01
Information query
IPC分类: