Invention Grant
- Patent Title: Isolated sensor structures such as for flexible substrates
- Patent Title (中): 隔离传感器结构,如柔性基板
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Application No.: US12130261Application Date: 2008-05-30
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Publication No.: US07973311B2Publication Date: 2011-07-05
- Inventor: Rene Lujan , William S. Wong
- Applicant: Rene Lujan , William S. Wong
- Applicant Address: US CA Palo Alto
- Assignee: Palo Alto Research Center Incorporated
- Current Assignee: Palo Alto Research Center Incorporated
- Current Assignee Address: US CA Palo Alto
- Agent Jonathan A. Small
- Main IPC: H01L31/0376
- IPC: H01L31/0376 ; H01L31/18

Abstract:
A photosensor structure includes a pixel metal layer disposed in physical and electrical contact with a pixel thin film transistor and a lower sensor layer of a p-i-n photosensor. The pixel metal layer extends laterally to an extent less that the lower sensor layer such that an overhang region is defined below the lower sensor layer and the adjacent the lateral edge of the pixel metal layer. When the relatively thick intrinsic sensor layer is formed over the lower sensor layer, it attaches to the upper surface and, due to the presence of the overhang region, the lateral edge of the lower sensor layer, forming a discrete intrinsic sensor layer structure over the pixel which is physically isolated from adjacent corresponding structures. This isolation allows for thermal expansion and contraction during formation of the intrinsic sensor layer without cracking the intrinsic sensor layer structure.
Public/Granted literature
- US20090294767A1 Isolated Sensor Structures Such As For Flexible Substrates Public/Granted day:2009-12-03
Information query
IPC分类: