Invention Grant
- Patent Title: Complementary metal oxide silicon image sensor and method of fabricating the same
- Patent Title (中): 互补金属氧化物硅图像传感器及其制造方法
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Application No.: US12696575Application Date: 2010-01-29
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Publication No.: US07973347B2Publication Date: 2011-07-05
- Inventor: Ki Sik Im
- Applicant: Ki Sik Im
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: The Law Offices of Andrew D. Fortney
- Agent Andrew D. Fortney; William K. Nelson
- Priority: KR10-2005-0134772 20051230
- Main IPC: H01L31/062
- IPC: H01L31/062

Abstract:
Disclosed is a method of fabricating a CMOS (Complementary Metal Oxide Silicon) image sensor. The method includes the steps of: forming a device protective layer and a metal interconnection on a substrate formed with a light receiving device; forming an inner micro-lens on the metal interconnection; coating an interlayer dielectric layer on the inner micro-lens and then forming a color filter; and forming an outer micro-lens including a planarization layer and photoresist on the color filter. The inner micro-lens is formed by depositing the outer layer on dome-shaped photoresist. The curvature radius of the inner micro-lens is precisely and uniformly maintained and the inner micro-lens is easily formed while improving the light efficiency. Since the fabrication process for the CMOS image sensor is simplified, the product yield is improved and the manufacturing cost is reduced.
Public/Granted literature
- US20100133421A1 Complementary Metal Oxide Silicon Image Sensor and Method of Fabricating the Same Public/Granted day:2010-06-03
Information query
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