Invention Grant
US07973364B2 Method for forming a one-transistor memory cell and related structure
有权
用于形成单晶体管存储单元及相关结构的方法
- Patent Title: Method for forming a one-transistor memory cell and related structure
- Patent Title (中): 用于形成单晶体管存储单元及相关结构的方法
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Application No.: US12072885Application Date: 2008-02-27
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Publication No.: US07973364B2Publication Date: 2011-07-05
- Inventor: Zoran Krivokapic
- Applicant: Zoran Krivokapic
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Farjami & Farjami LLP
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
According to one exemplary embodiment, a method for fabricating a one-transistor memory cell includes forming an opening by removing a portion of a gate stack of a silicon-on-insulator (SOI) device, where the SOI device is situated over a buried oxide layer. The method further includes forming a bottom gate of the one-transistor memory cell in a bulk substrate underlying the buried oxide layer. The method further includes forming a charge trapping region in the buried oxide layer. The charge trapping region is formed at an interface between a silicon layer underlying the gate stack and the buried oxide layer. The charge trapping region causes the one-transistor memory cell to have an increased sensing margin. The method further includes forming a top gate of the one-transistor memory cell in the opening. Also disclosed is an exemplary one-transistor memory cell fabricated utilizing the exemplary disclosed method.
Public/Granted literature
- US20090212363A1 Method for forming a one-transistor memory cell and related structure Public/Granted day:2009-08-27
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