Invention Grant
- Patent Title: Dual-gate, sonos, non-volatile memory cells and arrays thereof
- Patent Title (中): 双栅极,超声波,非易失性存储单元及其阵列
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Application No.: US11352788Application Date: 2006-02-13
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Publication No.: US07973366B2Publication Date: 2011-07-05
- Inventor: Chia-Hua Ho , Hang-Ting Lue , Yen-Hao Shih , Erh-Kun Lai , Kuang-Yeu Hsieh
- Applicant: Chia-Hua Ho , Hang-Ting Lue , Yen-Hao Shih , Erh-Kun Lai , Kuang-Yeu Hsieh
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
Memory cells which include a semiconductor substrate having a source region and a drain region separated by a channel region; a charge-trapping structure disposed above the channel region of the semiconductor substrate; a first gate disposed above the charge-trapping structure and proximate to the source region; and a second gate disposed above the charge-trapping structure and proximate to the drain region; where the first gate and the second gate are separated by a first nanospace are provided, along with arrays including a plurality of such cells, methods of manufacturing such cells and methods of operating such cells.
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