Invention Grant
US07973397B2 Package substrate having embedded semiconductor chip and fabrication method thereof
有权
具有嵌入式半导体芯片的封装衬底及其制造方法
- Patent Title: Package substrate having embedded semiconductor chip and fabrication method thereof
- Patent Title (中): 具有嵌入式半导体芯片的封装衬底及其制造方法
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Application No.: US12483528Application Date: 2009-06-12
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Publication No.: US07973397B2Publication Date: 2011-07-05
- Inventor: Shin-Ping Hsu , Kan-Jung Chia
- Applicant: Shin-Ping Hsu , Kan-Jung Chia
- Applicant Address: TW Taoyuan
- Assignee: Unimicron Technology Corp.
- Current Assignee: Unimicron Technology Corp.
- Current Assignee Address: TW Taoyuan
- Agency: Edwards Angell Palmer & Dodge LLP
- Agent Peter F. Corless; Steven M. Jensen
- Priority: TW97122052A 20080613
- Main IPC: H01L23/02
- IPC: H01L23/02 ; H01L27/146

Abstract:
A packaging substrate having a semiconductor chip embedded and a fabrication method thereof are provided. The method includes forming a semiconductor chip in a through cavity of a core board and exposing a photosensitive portion of the semiconductor chip from the through cavity; sequentially forming a first dielectric layer and a first circuit layer on the core board, the first circuit layer being electrically connected to the electrode pads of the semiconductor chip; forming a light-permeable window on the first dielectric layer to expose the photosensitive portion of the semiconductor chip and adhering a light-permeable layer onto the light-permeable window, thereby permitting light to penetrate through the light-permeable layer to reach the photosensitive portion. Therefore, when fabricated with the method, the packaging substrate dispenses with conductive wires and dams and thus can be downsized.
Public/Granted literature
- US20090309202A1 PACKAGE SUBSTRATE HAVING EMBEDDED SEMICONDUCTOR CHIP AND FABRICATION METHOD THEREOF Public/Granted day:2009-12-17
Information query
IPC分类: