Invention Grant
US07973941B2 Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels 有权
用于使用光纤接收器通道的干涉式微型光栅编码器读取头的参考信号产生配置

Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels
Abstract:
A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead may include primary fibers that provide reference mark primary signals processed to generate a reference signal with accuracy of approximately 0.2 microns. In some embodiments, a zone grating type reference mark may be embedded in a periodic scale grating, and configured such that it provides strong reference mark primary signals without disrupting periodic incremental measurement signals associated with the periodic scale grating. In one embodiment, the readhead may include secondary fibers used to generate reference mark secondary signals processed to generate a reference signal with accuracy of approximately 20 nanometers.
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