Invention Grant
US07974729B2 Server device and program with sub-recipe measurement communication
有权
服务器设备和程序与子配方测量通信
- Patent Title: Server device and program with sub-recipe measurement communication
- Patent Title (中): 服务器设备和程序与子配方测量通信
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Application No.: US12375590Application Date: 2007-07-09
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Publication No.: US07974729B2Publication Date: 2011-07-05
- Inventor: Masashi Takahashi , Minoru Obata , Noriaki Koyama
- Applicant: Masashi Takahashi , Minoru Obata , Noriaki Koyama
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2006-209424 20060801
- International Application: PCT/JP2007/063666 WO 20070709
- International Announcement: WO2008/015881 WO 20080207
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
A server device is provided with a measurement information storage unit 1201 which can store plural measurement information, i.e., information having a measurement value and time information indicating time; an instruction receiving unit for receiving an output instruction of the measurement information; a measurement information acquisition unit for acquiring, from the measurement information storage unit, the measurement information designated by the output instruction; an output information composing unit for composing output information by using the acquired measurement information; and an output unit for outputting the output information composed by the output information composing unit. The output instruction includes an instruction for designating one or more desired number of times of execution of a sub-recipe among plural number of times of execution of the sub-recipe in the recipe and the measurement information acquisition unit acquires measurement information corresponding to the sub-recipe designated by the output instruction.
Public/Granted literature
- US20090276076A1 SERVER DEVICE AND PROGRAM Public/Granted day:2009-11-05
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