Invention Grant
US07984648B2 Systems and methods for acceleration and rotational determination from an in-plane and out-of-plane MEMS device
有权
用于从平面内和平面外的MEMS装置加速和旋转确定的系统和方法
- Patent Title: Systems and methods for acceleration and rotational determination from an in-plane and out-of-plane MEMS device
- Patent Title (中): 用于从平面内和平面外的MEMS装置加速和旋转确定的系统和方法
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Application No.: US12183617Application Date: 2008-07-31
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Publication No.: US07984648B2Publication Date: 2011-07-26
- Inventor: Bob D. Horning , Ryan Supino
- Applicant: Bob D. Horning , Ryan Supino
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Fogg & Powers LLC
- Main IPC: G01P9/04
- IPC: G01P9/04 ; G01C19/56
Abstract:
A Micro-Electro-Mechanical Systems (MEMS) inertial sensor systems and methods determine linear acceleration and rotation in the in-pane and out-of-plane directions of the MEMS inertial sensor. An out-of-plane linear acceleration of the MEMS sensor may be sensed with the first out-of-plane electrode pair and the second out-of-plane electrode pair. An in-plane rotation of the MEMS sensor may be sensed with the first out-of-plane electrode pair and the second out-of-plane electrode. An in-plane linear acceleration of the MEMS sensor may be sensed with the first in-plane sense comb and the second in-plane sense comb. An out-of-plane rotation of the MEMS sensor may be sensed with the first in-plane sense comb and the second in-plane sense comb.
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