Invention Grant
US07985474B2 Wafer-dicing adhesive tape and method of producing chips using the same 有权
晶片切割胶带和使用其制造芯片的方法

Wafer-dicing adhesive tape and method of producing chips using the same
Abstract:
A wafer-dicing adhesive tape, containing two or more removable adhesive layers, on a base film, that have resin compositions containing a radiation-polymerizable compound, in which a content of the radiation-polymerizable compound in the resin composition constituting an outermost removable adhesive layer is different from that of an inner removable adhesive layer and a stress applied to the base film is sufficiently introduced to the outermost removable adhesive layer irradiated with radiation, so that said layer can be easily peeled off from chips cut; and a method of producing chips using the same.
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