Invention Grant
- Patent Title: Method for fracturing a pattern for writing with a shaped charged particle beam writing system using dragged shots
- Patent Title (中): 用成形带电粒子束书写系统使用拖曳镜头压印图案的方法
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Application No.: US12603580Application Date: 2009-10-21
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Publication No.: US07985514B2Publication Date: 2011-07-26
- Inventor: Akira Fujimura , Harold Robert Zable , Michael Tucker
- Applicant: Akira Fujimura , Harold Robert Zable , Michael Tucker
- Applicant Address: US CA San Jose
- Assignee: D2S, Inc.
- Current Assignee: D2S, Inc.
- Current Assignee Address: US CA San Jose
- Agency: The Mueller Law Office, P.C.
- Main IPC: G03F9/00
- IPC: G03F9/00 ; G03F1/00 ; G06F17/50

Abstract:
In the field of semiconductor production using shaped charged particle beam lithography, a method and system for fracturing or mask data preparation or proximity effect correction is disclosed, wherein a shot determined for a shaped charged particle beam writer system comprises dragging the charged particle beam across a surface during the shot, so as to form a complex pattern in a single, extended shot. The dragging may be done with either variable shaped beam (VSB) or character projection (CP) shots. Methods for specifying in the shot data the path for the dragged shot are also disclosed. Other embodiments include using dragged shots with partial projection, varying the dragging velocity during a shot, and combining dragged shots with conventional shots. A method and system for creating glyphs which contain dragged shots is also disclosed.
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