Three positive-type photosensitive material layers which are photosensitive to light having the same wavelength range are provided on a substrate, and an intermediate layer contains a light-absorbing agent. The ultraviolet absorbing agent contained in the intermediate layer prevents the intermediate layer and lower layer from being exposed during the exposure of an upper layer. After the upper layer is exposed, the intermediate layer and lower layer are exposed with the light having the same wavelength range, which is used to expose the upper layer.