Invention Grant
US07985612B2 Method and device for reducing crosstalk in back illuminated imagers
有权
用于减少背照射成像仪中串扰的方法和装置
- Patent Title: Method and device for reducing crosstalk in back illuminated imagers
- Patent Title (中): 用于减少背照射成像仪中串扰的方法和装置
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Application No.: US12132721Application Date: 2008-06-04
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Publication No.: US07985612B2Publication Date: 2011-07-26
- Inventor: Pradyumna Kumar Swain , Mahalingam Bhaskaran
- Applicant: Pradyumna Kumar Swain , Mahalingam Bhaskaran
- Applicant Address: US CA Menlo Park
- Assignee: SRI International
- Current Assignee: SRI International
- Current Assignee Address: US CA Menlo Park
- Agency: Lowenstein Sandler PC
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L21/00

Abstract:
A method and resulting device for reducing crosstalk in a back-illuminated imager is disclosed, comprising providing a substrate comprising an insulator layer and a seed layer substantially overlying the insulator layer, an interface being formed where the seed layer comes in contact with the insulator layer; forming an epitaxial layer substantially overlying the seed layer, the epitaxial layer defining plurality of pixel regions, each pixel region outlining a collection well for collecting charge carriers; and forming one of an electrical, optical, and electrical and optical barrier about the outlined collection well extending into the epitaxial layer to the interface between the seed layer and the insulator layer. The seed layer and the epitaxial layer of the device have a net dopant concentration profile which has an initial maximum value at the interface of the seed layer and the insulator layer and which decreases monotonically with increasing distance from an interface within an initial portion of the semiconductor substrate and the epitaxial layer.
Public/Granted literature
- US20090206377A1 METHOD AND DEVICE FOR REDUCING CROSSTALK IN BACK ILLUMINATED IMAGERS Public/Granted day:2009-08-20
Information query
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