- Patent Title: Solid-state imaging device and method for manufacturing the same
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Application No.: US12548918Application Date: 2009-08-27
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Publication No.: US07985614B2Publication Date: 2011-07-26
- Inventor: Yasushi Maruyama , Hideshi Abe , Hiroyuki Mori
- Applicant: Yasushi Maruyama , Hideshi Abe , Hiroyuki Mori
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: SNR Denton US LLP
- Priority: JP2003-374627 20031104
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A solid-state imaging device having a high sensitivity and a structure in which a miniaturized pixel is obtained, and a method for manufacturing the solid-state imaging device in which an interface is stable, a spectroscopic characteristic is excellent and which can be manufactured with a high yield ratio are provided. The solid-state imaging device includes at least a silicon layer formed with a photo sensor portion and a wiring layer formed on the front-surface side of the silicon layer, and in which light L is made to enter from the rear-surface side opposite to the front-surface side of the silicon layer and the thickness of the silicon layer 4 is 10 μm or less. Also, the method for manufacturing the solid-state imaging device at least includes the steps of: forming a semiconductor region of a photo sensor portion in a silicon layer of a layered substrate in which a silicon substrate, an intermediate layer and a silicon layer are laminated; bonding a first supporting substrate onto the silicon layer; removing the silicon substrate and the intermediate layer; forming thereafter a wiring portion above the silicon layer; bonding a second supporting substrate onto the wiring portion, and removing the first supporting substrate to make the silicon layer exposed.
Public/Granted literature
- US20090311820A1 SOLID-STATE IMAGING DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2009-12-17
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