Invention Grant
- Patent Title: Resin sealing method of semiconductor device
- Patent Title (中): 半导体器件的树脂密封方法
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Application No.: US12644477Application Date: 2009-12-22
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Publication No.: US07985629B2Publication Date: 2011-07-26
- Inventor: Teruaki Chino
- Applicant: Teruaki Chino
- Applicant Address: JP Nagano-shi
- Assignee: Shinko Electric Industries Co., Ltd.
- Current Assignee: Shinko Electric Industries Co., Ltd.
- Current Assignee Address: JP Nagano-shi
- Agency: Rabin, Hill & Clark LLP
- Priority: JP2008-328904 20081225
- Main IPC: H01L121/00
- IPC: H01L121/00

Abstract:
A resin sealing method of a semiconductor device, is provided with: providing a semiconductor device on which a dummy dump is formed; providing a support body including an adhesive layer provided on a surface of the support body; forming a recess in the adhesive layer; inserting the dummy bump of the semiconductor device into the recess of the adhesive layer; adhering the semiconductor device to the adhesive layer with the semiconductor device positioned on the support body; setting the supporting body having the semiconductor device in a resin sealing mold; supplying a resin into a cavity of the resin sealing mold; sealing the semiconductor device with the resin on the support body while using the dummy bump to inhibit displacement of the semiconductor device caused by a flow of the resin supplied into the cavity of the resin sealing mold; and removing the support body, the adhesive layer, and the dummy bump from the semiconductor device sealed with the resin.
Public/Granted literature
- US20100167469A1 RESIN SEALING METHOD OF SEMICONDUCTOR DEVICE Public/Granted day:2010-07-01
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