Invention Grant
- Patent Title: Method for forming microwires and/or nanowires
- Patent Title (中): 用于形成微丝和/或纳米线的方法
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Application No.: US12520385Application Date: 2007-12-20
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Publication No.: US07985632B2Publication Date: 2011-07-26
- Inventor: Jean-Charles Barbe , Erwan Dornel , Francois De Crecy , Joel Eymery
- Applicant: Jean-Charles Barbe , Erwan Dornel , Francois De Crecy , Joel Eymery
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0655822 20061221
- International Application: PCT/EP2007/064325 WO 20071220
- International Announcement: WO2008/074862 WO 20080626
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method for forming a wire in a layer based on a monocrystalline or amorphous material. The method forms two trenches in the layer, crossing through one face of the layer, separated from each other by one portion of the layer, by an etching of the layer on which is arranged an etching mask, and anneals, under hydrogenated atmosphere, the layer, the etching mask being maintained on the layer during the annealing. The depths and widths of the sections of the two trenches, and the width of a section of the portion of the layer, are such that the annealing eliminates a part of the portion of the layer, the two trenches then forming a single trench in which a remaining part of the portion of the layer forms the wire.
Public/Granted literature
- US20100047973A1 METHOD FOR FORMING MICROWIRES AND/OR NANOWIRES Public/Granted day:2010-02-25
Information query
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