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US07985639B2 Method for fabricating a semiconductor device having a semiconductive resistor structure 有权
一种具有半导体电阻器结构的半导体器件的制造方法

Method for fabricating a semiconductor device having a semiconductive resistor structure
Abstract:
Methods are provided for fabricating a semiconductor device. A method forms a conductive fin arrangement on a first region of a semiconductor substrate. The method continues by forming a semiconductive resistor structure on a second region of the semiconductor substrate after forming the conductive fin arrangement, and forming a gate stack foundation structure overlying the conductive fin arrangement after forming the semiconductive resistor structure. The method removes portions of the gate stack foundation structure overlying the first region of the semiconductor substrate to define a gate structure for the semiconductor device.
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