Invention Grant
US07985639B2 Method for fabricating a semiconductor device having a semiconductive resistor structure
有权
一种具有半导体电阻器结构的半导体器件的制造方法
- Patent Title: Method for fabricating a semiconductor device having a semiconductive resistor structure
- Patent Title (中): 一种具有半导体电阻器结构的半导体器件的制造方法
-
Application No.: US12562873Application Date: 2009-09-18
-
Publication No.: US07985639B2Publication Date: 2011-07-26
- Inventor: Frank Scott Johnson , Douglas Bonser
- Applicant: Frank Scott Johnson , Douglas Bonser
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, Inc.
- Current Assignee: GLOBALFOUNDRIES, Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/8234

Abstract:
Methods are provided for fabricating a semiconductor device. A method forms a conductive fin arrangement on a first region of a semiconductor substrate. The method continues by forming a semiconductive resistor structure on a second region of the semiconductor substrate after forming the conductive fin arrangement, and forming a gate stack foundation structure overlying the conductive fin arrangement after forming the semiconductive resistor structure. The method removes portions of the gate stack foundation structure overlying the first region of the semiconductor substrate to define a gate structure for the semiconductor device.
Public/Granted literature
- US20110070712A1 METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE HAVING A SEMICONDUCTIVE RESISTOR STRUCTURE Public/Granted day:2011-03-24
Information query
IPC分类: