Invention Grant
- Patent Title: Semiconductor device having a high aspect cylindrical capacitor and method for fabricating the same
- Patent Title (中): 具有高方位圆柱形电容器的半导体器件及其制造方法
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Application No.: US12649610Application Date: 2009-12-30
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Publication No.: US07985645B2Publication Date: 2011-07-26
- Inventor: Cheol Hwan Park , Ho Jin Cho , Dong Kyun Lee
- Applicant: Cheol Hwan Park , Ho Jin Cho , Dong Kyun Lee
- Applicant Address: KR Kyoungki-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Kyoungki-do
- Agency: Ladas & Parry LLP
- Priority: KR10-2009-0059510 20090630
- Main IPC: H01L21/8242
- IPC: H01L21/8242

Abstract:
A semiconductor device having a high aspect cylindrical capacitor and a method for fabricating the same is presented. The high aspect cylindrical type capacitor is a stable structure which is not prone to causing bunker defects and losses in a guard ring. The semiconductor device includes the cylindrical type capacitor structure, a storage node oxide, a guard ring hole, a conductive layer, and a capping oxide. The cylindrical type capacitor structure in a cell region includes a cylindrical type lower electrode, a dielectric and an upper electrode. The storage node oxide is in a peripheral region over the semiconductor substrate. The conductive layer coating the guard ring hole. The guard ring hole at a boundary of the peripheral region that adjoins the cell region over the semiconductor substrate. The capping oxide partially fills in a part of the conductive layer. The gapfill film filling in the rest of the conductive layer.
Public/Granted literature
- US20100327410A1 SEMICONDUCTOR DEVICE HAVING A HIGH ASPECT CYLINDRICAL CAPACITOR AND METHOD FOR FABRICATING THE SAME Public/Granted day:2010-12-30
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