Invention Grant
- Patent Title: Method for manufacturing dies formed with a dielectric layer
- Patent Title (中): 用电介质层形成模具的方法
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Application No.: US12423486Application Date: 2009-04-14
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Publication No.: US07985662B2Publication Date: 2011-07-26
- Inventor: Yu-Chieh Huang
- Applicant: Yu-Chieh Huang
- Applicant Address: TW Hsinchu
- Assignee: Powertech Technology Inc.
- Current Assignee: Powertech Technology Inc.
- Current Assignee Address: TW Hsinchu
- Agency: Muncy, Geissler, Olds & Lowe, PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of manufacturing dies formed with a dielectric layer is revealed. A liquid dielectric layer is formed on the dicing tape. The liquid dielectric layer is heated to be sticky. Then, a wafer is attached to the dielectric layer on the dicing tape. The wafer is diced into a plurality of dies on the dicing tape. The dies with attached portions of the dielectric layer are picked up to be peeled and separated from the dicing tape. The implementation of the dicing tape can be expanded to resolve various issues such as wafer contaminations, wafer warpage due to multiple heating and mismatching of thermal expansion coefficients, and wafer singulation problems due to alignment difficulties. The wafer handling steps can further be reduced to increase processing yield and to enhance easy and better processing.
Public/Granted literature
- US20100261337A1 METHOD FOR MANUFACTURING DIES FORMED WITH A DIELECTRIC LAYER Public/Granted day:2010-10-14
Information query
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