Invention Grant
US07985671B2 Structures and methods for improving solder bump connections in semiconductor devices
有权
用于改善半导体器件中的焊料凸点连接的结构和方法
- Patent Title: Structures and methods for improving solder bump connections in semiconductor devices
- Patent Title (中): 用于改善半导体器件中的焊料凸点连接的结构和方法
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Application No.: US12344774Application Date: 2008-12-29
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Publication No.: US07985671B2Publication Date: 2011-07-26
- Inventor: Timothy H. Daubenspeck , Jeffrey P. Gambino , Christopher D. Muzzy , Wolfgang Sauter , Timothy D. Sullivan
- Applicant: Timothy H. Daubenspeck , Jeffrey P. Gambino , Christopher D. Muzzy , Wolfgang Sauter , Timothy D. Sullivan
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Richard Kotulak
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
Structures with improved solder bump connections and methods of fabricating such structures are provided herein. The method includes forming an upper wiring layer in a dielectric layer and depositing one or more dielectric layers on the upper wiring layer. The method further includes forming a plurality of discrete trenches in the one or more dielectric layers extending to the upper wiring layer. The method further includes depositing a ball limiting metallurgy or under bump metallurgy in the plurality of discrete trenches to form discrete metal islands in contact with the upper wring layer. A solder bump is formed in electrical connection to the plurality of the discrete metal islands.
Public/Granted literature
- US20100164104A1 Structures and Methods for Improving Solder Bump Connections in Semiconductor Devices Public/Granted day:2010-07-01
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