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US07985671B2 Structures and methods for improving solder bump connections in semiconductor devices 有权
用于改善半导体器件中的焊料凸点连接的结构和方法

Structures and methods for improving solder bump connections in semiconductor devices
Abstract:
Structures with improved solder bump connections and methods of fabricating such structures are provided herein. The method includes forming an upper wiring layer in a dielectric layer and depositing one or more dielectric layers on the upper wiring layer. The method further includes forming a plurality of discrete trenches in the one or more dielectric layers extending to the upper wiring layer. The method further includes depositing a ball limiting metallurgy or under bump metallurgy in the plurality of discrete trenches to form discrete metal islands in contact with the upper wring layer. A solder bump is formed in electrical connection to the plurality of the discrete metal islands.
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