Invention Grant
- Patent Title: Gap free anchored conductor and dielectric structure and method for fabrication thereof
- Patent Title (中): 无缝隙锚固导体和电介质结构及其制造方法
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Application No.: US12190814Application Date: 2008-08-13
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Publication No.: US07985928B2Publication Date: 2011-07-26
- Inventor: Tibor Bolom , Stephan Grunow , David L. Rath , Andrew Herbert Simon
- Applicant: Tibor Bolom , Stephan Grunow , David L. Rath , Andrew Herbert Simon
- Applicant Address: US NY Armonk US CA Sunnyvale
- Assignee: International Business Machines Corporation,Advanced Micro Devices, Inc. (“AMD”)
- Current Assignee: International Business Machines Corporation,Advanced Micro Devices, Inc. (“AMD”)
- Current Assignee Address: US NY Armonk US CA Sunnyvale
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Wenjie Li
- Main IPC: H05K1/11
- IPC: H05K1/11

Abstract:
A microelectronic structure and a method for fabricating the microelectronic structure use a dielectric layer that is located and formed upon a first conductor layer. An aperture is located through the dielectric layer. The aperture penetrates vertically into the first conductor layer and extends laterally within the first conductor layer beneath the dielectric layer while not reaching the dielectric layer, to form an extended and winged aperture. A contiguous via and interconnect may be formed anchored into the extended and winged aperture while using a plating method, absent voids.
Public/Granted literature
- US20090151981A1 GAP FREE ANCHORED CONDUCTOR AND DIELECTRIC STRUCTURE AND METHOD FOR FABRICATION THEREOF Public/Granted day:2009-06-18
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