Invention Grant
US07985942B2 Method of providing consistent quality of target material removal by lasers having different output performance characteristics
有权
通过具有不同输出性能特征的激光提供一致的目标材料去除质量的方法
- Patent Title: Method of providing consistent quality of target material removal by lasers having different output performance characteristics
- Patent Title (中): 通过具有不同输出性能特征的激光提供一致的目标材料去除质量的方法
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Application No.: US11131432Application Date: 2005-05-17
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Publication No.: US07985942B2Publication Date: 2011-07-26
- Inventor: Weisheng Lei , Glenn Simenson , Jeff Howerton , Mark Unrath
- Applicant: Weisheng Lei , Glenn Simenson , Jeff Howerton , Mark Unrath
- Applicant Address: US OR Portland
- Assignee: Electro Scientific Industries, Inc.
- Current Assignee: Electro Scientific Industries, Inc.
- Current Assignee Address: US OR Portland
- Agency: Stoel Rives LLP
- Main IPC: B23K26/00
- IPC: B23K26/00

Abstract:
Laser pulse energy adjustments are motivated by an understanding of the effect of laser pulse width variations among different lasers on satisfying a quality metric associated with a laser-processed target. In a preferred embodiment, the adjustments normalize this effect among different lasers drilling vias in a target specimen. The number of pulses delivered to the target specimen to form each via can be modified, based on the pulse energy applied to the via location, to control different via quality metrics.
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