Invention Grant
US07985959B2 Self-aligned vertical bipolar junction transistor for phase change memories
有权
用于相变存储器的自对准垂直双极结型晶体管
- Patent Title: Self-aligned vertical bipolar junction transistor for phase change memories
- Patent Title (中): 用于相变存储器的自对准垂直双极结型晶体管
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Application No.: US12218171Application Date: 2008-07-11
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Publication No.: US07985959B2Publication Date: 2011-07-26
- Inventor: Michele Magistretti , Fabio Pellizzer , Augusto Benvenuti , Marcello Mariani
- Applicant: Michele Magistretti , Fabio Pellizzer , Augusto Benvenuti , Marcello Mariani
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Trop, Pruner & Hu, P.C.
- Main IPC: H01L29/02
- IPC: H01L29/02 ; H01L27/082

Abstract:
A phase change memory may include self-aligned polysilicon vertical bipolar junction transistors used as select devices. The bipolar junction transistors may be formed with double shallow trench isolation. For example, the emitters of each bipolar transistor may be defined by a first set of parallel trenches in one direction and a second set of parallel trenches in the opposite direction. In some embodiments, the formation of parasitic PNP transistors between adjacent emitters may be avoided.
Public/Granted literature
- US20100006816A1 Self-aligned vertical bipolar junction transistor for phase change memories Public/Granted day:2010-01-14
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